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[ 特殊顯微鏡設備 | Wafer Probing | 標準型 12 "用 ]

 ■Analytical Probe Station/4點探針/探針量測儀
   Manual Probe Station for wafer 12"/標準型12"晶圓用

 
Model:ED-12

 

 Features

   Coaxial-Driven Chuck Stage

 RF Probing Field Upgradable

 20X~4000X Magnification

 Backlash-Free Movement

 Choice Of Microscope (Tilt) Up/Down

 For E-Z Revolving Objevtives

 Specifications

 Vacuum Chuck

 12" Stainless Steel

 Chuck Stage

 12" x12" Travel

 Chuck Theta

 0~30 degree

 Platen Up/Down

 4mm Adjustable

 Platen

 12 Micropositioner

 Microscope Stage

 1" x1" Travel

 Requirements

 Electrical

 110 VAC, 60Hz

 220 VAC, 60Hz

 Vacuum

 -250 mmHg, 7 liter/min

 Dimensions

 920mmW x 660mmD x 700mmH With Microscope

 Weight 180 Kg  With Microscope

 Accessories

 RF Probe / Cables

 Active Probes

 Low Current / Capacitance Probes

 High Voltage Probes

 Laser Cutter

 Ultrasonic Cutter

 CCTV System

 Photomicrographics

 Probe Card holder

 Packaged Device Holder

 PCB Holder

 Thermal Chuck

 Liquid Crystal Kit

 Vibration Free Table

 Shielding Box

 Test Bench

 Instrument Case With Caster

 Microscope Quick Lift

 Dark Field / Normarski Inspection

 Chuck Vacuum Pattern

 Gold Plated Chuck

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