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[ 電子顯微鏡前處理設備 | S.E.M ]

■ Sputter Coater - 鍍金機

108 Auto Sputter Coater SPEC.
Manual or automatic operation
Simple easy-touch front panel push button controls (microprocessor based system operation)
Planar Magnetron sputter head to minimize sample heating
Integrated all metal vacuum lines,O-ring seals and QF connection system for rapid pump down
Constant current feedback controlled power supply(operates independent of pressure)
Optional thickness monitor with thickness termination function for repetitive results
Excellent price performance
208 HR Sputter Coater SPEC.
Manual or automatic operation
Specially tailored to coat high resolution FE-SEM samples
Precision control in the 0.5-3.0nm range
HI/LOW vacuum chamber design for rapid working distance adjustment
Includes thickness monitor with terminator for reproducible film  thickness
Includes Rotary/Planetary/Tilting stage for evenly distributed coatings on multiple samples
Includes all metal integrated vacuum system using ISO and QF connection system
Includes Cr and Pt/Pd sputter targets
Optional oil free vacuum system

Carbon Coater - 鍍碳機

108 Auto Carbon Coater SPEC.
Manual or automatic operation
Digital and Analog front panel controls(Microprocessor based system operation)
Integrated all metal vacuum lines,O-ring seals and QF connection system for rapid pump down
Digital power and timer settings
Optional thickness monitor for reproducible file thickness
Rod fed evaporation source allows for multiple runs before needing replacement
Feedback controlled power supply to control and stabilize deposition
Excellent price performance
208 Turbo Carbon Coater SPEC.
Manual or automatic operation
Versatile HIGH/LOW vacuum operation to optimize carbon film to SEM,TEM or Microprobe requirements
Feedback controlled power supply for exceptional evaporation source stability
Optional thickness monitor for highly reproducible film thickness
Penning/pirani vacuum measuring system
Optional Rotary/Planetary/Tilting stage for evenly distributed coatings on multiple samples
Rapid change over to other accessories using convenient top plate "drop in" system
Sputter Coater 鍍金機 Carbon Coater 鍍碳機 鍍金鍍碳機